H-atom interaction with amorphous hydrocarbon films: Effect of surface temperature, H flux and exposure time
作者： A. Erradi , R. Clergereaux , F. Gaboriau
DOI: 10.1063/1.3369286
关键词: Hydrogen atom 、 Amorphous solid 、 Materials science 、 Molecular physics 、 Hydrocarbon 、 Analytical chemistry 、 Carbon film 、 Carbon 、 Flux 、 Hydrogen 、 Activation energy
摘要: In the present paper, we study interaction between atomic hydrogen generated in a microwave afterglow with amorphous hydrogenated carbon films. A simple surface model is described and compared experimental results. Erosion rate time dependent exhibits transient regime before reaching constant value. Estimate of modified film thickness by ellipsometry shows that increases becomes equal to 1.4 nm when permanent regime. addition, this limit independent on conditions, e.g., flux temperature. depends linearly arriving at an exponential increase proposed paper good agreement data allows giving estimate erosion activation energy Ea=0.2 eV. This value involved reaction atom sp3 hybridization.
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