作者: D.W. Schindel , L. Zou , D.A. Hutchins , M. Sayer
DOI: 10.1109/ULTSYM.1992.275866
关键词: Capacitive sensing 、 Capacitance 、 Optoelectronics 、 Kapton 、 Materials science 、 Transducer 、 Electromagnetic acoustic transducer 、 Capacitive micromachined ultrasonic transducers 、 Ultrasonic sensor 、 Lead zirconate titanate
摘要: The beam profiles of conventional capacitive air transducers are presented at frequencies up to 1.5 MHz and shown be highly non-uniform, as is the case in water. In attempting remedy this problem, a new transducer fabricated using micromachined silicon backplate commercially available thin metallized Kapton film. results characterization device presented. They indicate which wideband, reversible, possibly more sensitive generation detection than typical lead zirconate titanate (PZT) air-coupled transducer. usefulness an effective noncontact demonstrated through successful airborne ultrasonic waves generated by Lamb mode propagating carbon fiber reinforced polymer plate, surface breaking bulk brass. >