Horizontal position detecting device

作者： Takeshi Sudo , Makoto Uehara , Fujio Kanatani

DOI:

关键词: Materials science 、 Off-axis illumination 、 Cylindrical lens 、 Horizontal position representation 、 Lens (optics) 、 Ray 、 Optics 、 Focal length 、 Optical axis

摘要: Disclosed is a horizontal position detecting device for maintaining the surface of body to be inspected vertically optical axis main objective lens. The includes an illumination system and condenser lens system. supplies parallel light rays from direction oblique condenses supplied by reflected body. axes are arranged substantially symmetrically with respect