作者: A. Meldrum , R. F. Jr. Haglund , L. A. Boatner , C. W. White
DOI: 10.1002/1521-4095(200110)13:19<1431::AID-ADMA1431>3.0.CO;2-Z
关键词: Nanotechnology 、 Materials science 、 Ion 、 Nanocomposite 、 Ion implantation
摘要: … prepared and it was implanted in situ with 250 keV Pb to a dose of 4 î 1016 ions/cm2. Electron … of thin films, development of durable lithographic masks) appears to be one of the most …