Nanocomposite Materials Formed by Ion Implantation

作者: A. Meldrum , R. F. Jr. Haglund , L. A. Boatner , C. W. White

DOI: 10.1002/1521-4095(200110)13:19<1431::AID-ADMA1431>3.0.CO;2-Z

关键词: NanotechnologyMaterials scienceIonNanocompositeIon implantation

摘要: … prepared and it was implanted in situ with 250 keV Pb to a dose of 4 î 1016 ions/cm2. Electron … of thin films, development of durable lithographic masks) appears to be one of the most …

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