Method and scanning electron microscope for measuring width of material on sample
作者： Tadanori Hitachi High-Techn. Corp. Takahashi
DOI:
关键词: Optics 、 Basis (linear algebra) 、 Object (computer science) 、 Dimension (vector space) 、 Scanning electron microscope 、 Mathematics 、 Sample (graphics) 、 Beam diameter 、 Signal
摘要: A width-measurement method of reducing or eliminating an error in measurement a width object on sample resulting from the dimension beam diameter, wherein width-measured value to be which has been obtained basis secondary signal particles emitted having thereon is corrected with respect diameter.
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