Combined reactive magnetron sputtering and plasma decomposition of non-volatile precursors to grow luminescent thin films
作者： Jorge Gil-Rostra , Francisco Yubero , Francisco J. Ferrer , Agustín R. González-Elipe
DOI: 10.1016/J.SURFCOAT.2013.02.016
关键词: Sputter deposition 、 Sublimation (phase transition) 、 Plasma 、 Mixed oxide 、 Luminescence 、 Materials science 、 Sputtering 、 Inorganic chemistry 、 Thin film 、 Metal
摘要: Abstract This paper reports a new procedure of the preparation mixed oxide thin films that combines traditional reactive magnetron sputtering deposition with plasma activated decomposition non-volatile precursors sublimated by means an effusion cell. The possibilities this experimental are illustrated luminescent consisting rare earth (RE) cations (Tb3 +, Eu3 +) incorporated in matrix (TiO2 and SiO2). component was supplied from metallic Ti or Si targets, while RE cation dosed sublimation acetylacetonate compounds selected elements. obtained have been fully characterized different methods their properties studied as function type concentration element present film. advantages synthesis highlighted regard to its versatility possibility tailoring complex materials.
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