Advances in Small Spot ESCA

摘要: The changes in Electron Spectroscopy for Chemical Analysis (ESCA) equipment since 1982 have significantly expanded the range of applications and general utility technique. Most these center around improvements spatial resolution although there also been speed energy resolution. implications extend beyond obvious ability to obtain information from small features on samples. three major approaches controlling are: (1) defined area x-ray sources, (2) limited field-of-view electron analyzers, (3) imaging analyzers. Each will be reviewed briefly their salient contrasted. These advances instrumentation brought about following benefits users ESCA technique: analyze features, rapid depth profiling, multiple samples, (4) improved charging control. Examples are included.