Efficient thermal activation optical switch and method of making the same
作者： Richard E. Haven , Yaoling Pan , Michele Palmieri
DOI:
关键词: Materials science 、 Optical switch 、 Thermal 、 Oxide 、 Heat losses 、 Insulator (electricity) 、 Optoelectronics 、 Trench
摘要: An optical switch having an insulator under a heater element is disclosed. The reduces the heat loss thereby making more efficient. fabricated embedded in underlying substrate on which and intersection are fabricated. A method of fabricating trench etched filled with oxide or other suitable insulating material. Then, above insulator.
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