Ferroelectric Properties of SrRuO3/(Ba, Sr)TiO3/SrRuO3 Epitaxial Capacitor
作者： Takashi Kawakubo , Shuichi Komatsu , Kazuhide Abe , Kenya Sano , Naoko Yanase
DOI: 10.1143/JJAP.37.5108
关键词: Ferroelectric capacitor 、 Dielectric 、 Strontium titanate 、 Relative permittivity 、 Ferroelectricity 、 Optoelectronics 、 Capacitor 、 Capacitance 、 Materials science 、 Polarization (electrochemistry)
摘要: Ferroelectric properties were investigated using SrRuO3/(Bax, Sr1-x)TiO3(BSTO)/SrRuO3 all-perovskite heteroepitaxial capacitors on strontium titanate substrates. The dielectric film had a composition with Ba content of x=0 to 1, i.e., the whole SrTiO3–BaTiO3 solid-solution system. c-axis BSTO was elongated depending content, and reached 0.441 nm at BaTiO3 composition, which 8.6% larger than bulk c-axis. A peak relative constant 870 maximum remanent polarization (2Pr) 58 µC/cm2 obtained thickness 20 nm. These are highest storage capacitance capacitor thinnest ferroelectric reported so far. Possibilities for deep submicron memory applications also discussed.
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jsap.jp参考文章(3)
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