Acoustic method and apparatus for measuring surfaces of wafers and similar articles
作者： William R. Wheeler , George J. Kren
DOI:
关键词: Surface (mathematics) 、 Edge (geometry) 、 Ring (chemistry) 、 System of measurement 、 Optics 、 Calibration 、 Mathematics 、 Reference surface 、 Transducer 、 Rotation
摘要: A measurement system wherein an acoustic distance measuring transducer is moved over a flat reference surface, the from to calibration surface and then test surface. The along path within ring while top edge of used support mounted for rotation so that can scan supported at locus points. Scans across are compared measure deviations
lens.org 参考文章(3)
Paul D. Grimmer, John C. McKechnie, Surface profile follower and indicator system ,(1978)
Karel Urbanek, William R. Wheeler, George J. Kren, Gauge for measuring distance to planar surfaces and thicknesses of planar members ,(1978)
Johann H Meier, Sonic detection apparatus ,(1967)