作者: Y.S. Seo , H.Wk. Lee , H.C. Kwon , J. Choi , S.M. Lee
DOI: 10.1016/J.TSF.2010.11.057
关键词: Atomic physics 、 Electron 、 Capacitively coupled plasma 、 Ion 、 Plasma 、 Atmospheric-pressure plasma 、 Ion source 、 Plasma cleaning 、 Low frequency 、 Chemistry
摘要: Abstract Unique atmospheric pressure plasma devices are designed to investigate the characteristics for various driving frequencies under same operating conditions. Electrical properties of plasma, gas temperature, formation jets, and sterilization efficiency studied two different 13 kHz (low frequency) 877 MHz (microwave frequency). When compared with low frequency microwave is found have better electrical such as no electric shock safety, high discharge current effective chemical reactions, clean waveform homogenous power coupling efficiency. Furthermore, leads which related intensity atomic oxygen. One-dimensional particle-in-cell simulation reveals that has substantial electrons in energy range 2–5 eV (bond dissociation energy), thus this can produce more It shows probability producing ions, damage electrode, plasma.