Strategies for High Quality Injection Moulding of Polymer Nanopillars
作者： Rasmus H. Pedersen , Qian Xu , John M. Stormonth-Darling , Nikolaj Gadegaard
关键词: Replica 、 Nanostructure 、 Layer (electronics) 、 Injection moulding 、 Materials science 、 Nanopillar 、 Fabrication 、 Polymer 、 Plasma polymerization 、 Nanotechnology
摘要: Injection moulding is a proven technology for high-throughput production of nanostructures, but replication raised structures considerable challenge, due to the complexities cavity filling. We have developed platform systematically study effects nanostructures with aspect ratios up 1.2:1. A master template containing continuous variation in height produced by novel fabrication approach using plasma polymerized hexane layer, deposited thickness gradient, as sacrificial etch mask. Results show that careful choice process parameters can control stretching nanopillar replica dimensions, allowing variety final pattern heights single master.
sci-hub.se 参考文章(21)
Maria Matschuk, Niels B Larsen, Injection molding of high aspect ratio sub-100?nm nanostructures Journal of Micromechanics and Microengineering. ,vol. 23, pp. 025003- ,(2013) , 10.1088/0960-1317/23/2/025003
R.H. Pedersen, M. Hamzah, S. Thoms, P. Roach, M.R. Alexander, N. Gadegaard, Electron beam lithography using plasma polymerized hexane as resist Microelectronic Engineering. ,vol. 87, pp. 1112- 1114 ,(2010) , 10.1016/J.MEE.2009.11.043
Henrik Pranov, Henrik Koblitz Rasmussen, Niels Bent Larsen, Nikolaj Gadegaard, On the injection molding of nanostructured polymer surfaces Polymer Engineering and Science. ,vol. 46, pp. 160- 171 ,(2006) , 10.1002/PEN.20459
Feidhlim T. O'Neill, John T. Sheridan, Photoresist reflow method of microlens production Part I: Background and experiments Optik. ,vol. 113, pp. 391- 404 ,(2002) , 10.1078/0030-4026-00186
Xiaolin Wang, Alla Albrecht, Hanh H. Mai, Carsten Woidt, Tamara Meinl, Michael Hornung, Martin Bartels, Hartmut Hillmer, High resolution 3D NanoImprint technology: Template fabrication, application in Fabry-Pérot-filter-array-based optical nanospectrometers Microelectronic Engineering. ,vol. 110, pp. 44- 51 ,(2013) , 10.1016/J.MEE.2013.04.038
Arne Schleunitz, Vitaliy A. Guzenko, Andreas Schander, Marko Vogler, Helmut Schift, Selective profile transformation of electron-beam exposed multilevel resist structures based on a molecular weight dependent thermal reflow Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. ,vol. 29, pp. 06F302- ,(2011) , 10.1116/1.3634013
Yifu Ding, Jirun Sun, Hyun Wook Ro, Zhen Wang, Jing Zhou, Nancy J. Lin, Marcus T. Cicerone, Christopher L. Soles, Sheng Lin-Gibson, Thermodynamic Underpinnings of Cell Alignment on Controlled Topographies Advanced Materials. ,vol. 23, pp. 421- 425 ,(2011) , 10.1002/ADMA.201001757
Lino Ferreira, Jeffrey M. Karp, Luis Nobre, Robert Langer, New Opportunities: The Use of Nanotechnologies to Manipulate and Track Stem Cells Cell Stem Cell. ,vol. 3, pp. 136- 146 ,(2008) , 10.1016/J.STEM.2008.07.020
Patrick Carlberg, Lars Montelius, Jonas Tegenfeldt, Nanoimprint in PDMS on glass with two-level hybrid stamp Microelectronic Engineering. ,vol. 85, pp. 210- 213 ,(2008) , 10.1016/J.MEE.2007.05.010
John M. Stormonth-Darling, Nikolaj Gadegaard, Injection Moulding Difficult Nanopatterns with Hybrid Polymer Inlays Macromolecular Materials and Engineering. ,vol. 297, pp. 1075- 1080 ,(2012) , 10.1002/MAME.201100397