Mechanism and direct dynamics studies for the reaction of monoethylsilane EtSiH3 with atomic O (3P)

作者: Tingli Sun , Qingzhu Zhang , Xiaohui Qu , Wenxing Wang , None

DOI: 10.1016/J.CPLETT.2005.03.128

关键词: Ab initioGroup (periodic table)Methyl groupMethyleneCurvaturePhysical chemistryRange (particle radiation)ChemistryThermodynamicsSilylationQuantum tunnelling

摘要: Abstract In this Letter, we present mechanism and direct dynamics calculations for the reaction of EtSiH 3 with atomic O ( P) first time. This takes place through three possible channels: H abstraction from silyl group (SiH ), methylene (CH 2 methyl ). On basis ab initio data, properties each channel have been deduced by canonical variational transition state theory (CVT) small-curvature tunneling (SCT) contribution over a wide temperatures range 200–3000 K. The results show that effect is small in lower temperature range, curvature important all channels.

参考文章(24)
A. Walkiewicz-Pietrzykowska, M. Kryszewski, A. M. Wrobel, ALKYLSILANES AND ALKYLCARBOSILANES AS SINGLE-SOURCE PRECURSORS FOR THE FORMATION OF A-SI:C:H THIN-FILM MATERIALS BY ATOMIC HYDROGEN-INDUCED CHEMICAL V APOUR DEPOSITION Polish Journal of Chemistry. ,vol. 71, pp. 1831- 1840 ,(1997)
Qingzhu Zhang, Yueshu Gu, Shaokun Wang, None, Kinetic and mechanistic studies on the abstraction reactions of atomic O (3P) with (CH3)2SiH2 and (CH3)3SiH Journal of Chemical Physics. ,vol. 118, pp. 633- 642 ,(2003) , 10.1063/1.1523904
George S. Hammond, A Correlation of Reaction Rates Journal of the American Chemical Society. ,vol. 77, pp. 334- 338 ,(1955) , 10.1021/JA01607A027
J. Espinosa-Garcia, J. C. Corchado, Reliability of the Single-Point Calculation Technique at Characteristic Points of the Potential Energy Surface The Journal of Physical Chemistry. ,vol. 99, pp. 8613- 8616 ,(1995) , 10.1021/J100021A026
Michiro Hayashi, Chi Matsumura, The Microwave Spectrum oftrans-Ethylmethylsilane Bulletin of the Chemical Society of Japan. ,vol. 45, pp. 732- 735 ,(1972) , 10.1246/BCSJ.45.732
Jonathan D. Chapple‐Sokol, Carmen J. Giunta, Roy G. Gordon, A Kinetics Study of the Atmospheric Pressure CVD Reaction of Silane and Nitrous Oxide Journal of The Electrochemical Society. ,vol. 136, pp. 2993- 3003 ,(1989) , 10.1149/1.2096390
Kiet A. Nguyen, Charles F. Jackels, Donald G. Truhlar, Reaction-path dynamics in curvilinear internal coordinates including torsions Journal of Chemical Physics. ,vol. 104, pp. 6491- 6496 ,(1996) , 10.1063/1.471369
Qingzhu Zhang, Dongju Zhang, Shaokun Wang, Yueshu Gu, None, Ab Initio and Kinetic Calculations for the Reactions of H with (CH3)(4-n)GeHn (n = 1, 2, 3, 4) Journal of Physical Chemistry A. ,vol. 106, pp. 122- 129 ,(2002) , 10.1021/JP012730E
Yi Ping Liu, Gillian C. Lynch, Thanh N. Truong, Da Hong Lu, Donald G. Truhlar, Bruce C. Garrett, Molecular modeling of the kinetic isotope effect for the [1,5]-sigmatropic rearrangement of cis-1,3-pentadiene Journal of the American Chemical Society. ,vol. 115, pp. 2408- 2415 ,(1993) , 10.1021/JA00059A041