Epitaxially grown sputtered LaAlO3 films
作者： A. E. Lee , C. E. Platt , J. F. Burch , R. W. Simon , J. P. Goral
DOI: 10.1063/1.104153
关键词: Thin film 、 Mineralogy 、 Carbon film 、 Scanning electron microscope 、 Sputtering 、 Transmission electron microscopy 、 Crystal growth 、 Optoelectronics 、 Epitaxy 、 Dielectric 、 Materials science
摘要: We have grown crystalline thin films of LaAlO3 using off‐axis rf sputtering from a single stoichiometric target. The grow epitaxially on SrTiO3 and LaAlO3 (100) substrates as well YBa2Cu3O7 films. report the growth conditions used to make these films, properties bilayer trilayer structures containing both Transmission electron microscopy cross‐sectional x‐ray diffraction analyses indicate that all constituent in multilayers interfaces between are sharply defined. Preliminary transport measurements show can be for dielectric layers variety high‐temperature superconductor electronic circuits.
scitation.org
aip.org
sci-hub.se 参考文章(8)
Science and Technology of Thin Film Superconductors 2 Plenum Press. ,(1989) , 10.1007/978-1-4684-1345-8
John J. Kingston, Frederick C. Wellstood, Philippe Lerch, Andrew H. Miklich, John Clarke, Multilayer YBa2Cu3Ox‐SrTiO3‐YBa2Cu3Ox films for insulating crossovers Applied Physics Letters. ,vol. 56, pp. 189- 191 ,(1990) , 10.1063/1.103281
P. Chaudhari, R. H. Koch, R. B. Laibowitz, T. R. McGuire, R. J. Gambino, Critical-current measurements in epitaxial films ofYBa2Cu3O7−xcompound Physical Review Letters. ,vol. 58, pp. 2684- 2686 ,(1987) , 10.1103/PHYSREVLETT.58.2684
R. W. Simon, C. E. Platt, A. E. Lee, G. S. Lee, K. P. Daly, M. S. Wire, J. A. Luine, M. Urbanik, Low‐loss substrate for epitaxial growth of high‐temperature superconductor thin films Applied Physics Letters. ,vol. 53, pp. 2677- 2679 ,(1988) , 10.1063/1.100543
Martin C. Nuss, P. M. Mankiewich, R. E. Howard, B. L. Straughn, T. E. Harvey, C. D. Brandle, G. W. Berkstresser, K. W. Goossen, P. R. Smith, Propagation of terahertz bandwidth electrical pulses on YBa2Cu3O7−δtransmission lines on lanthanum aluminate Applied Physics Letters. ,vol. 54, pp. 2265- 2267 ,(1989) , 10.1063/1.101519
C. B. Eom, J. Z. Sun, K. Yamamoto, A. F. Marshall, K. E. Luther, T. H. Geballe, S. S. Laderman, Insitugrown YBa2Cu3O7−dthin films from single‐target magnetron sputtering Applied Physics Letters. ,vol. 55, pp. 595- 597 ,(1989) , 10.1063/1.102436
S. Geller, V. B. Bala, Crystallographic studies of perovskite‐like compounds. II. Rare earth alluminates Acta Crystallographica. ,vol. 9, pp. 1019- 1025 ,(1956) , 10.1107/S0365110X56002965
Reinmut K. Hoffmann, Harlan H. Howe, Handbook of microwave integrated circuits Norwood. ,(1987)