Synthesis of Y-Ba-Cu-O Thin Films on Sapphire Substrates by RF Magnetron Sputtering
作者： Osamu Michikami , Hidefumi Asano , Yujiro Katoh , Shugo Kubo , Keiichi Tanabe
关键词: X-ray crystallography 、 Substrate (electronics) 、 Scanning electron microscope 、 Sputter deposition 、 Sapphire 、 Mineralogy 、 Thin film 、 Chemistry 、 Crystal growth 、 Analytical chemistry 、 Solid solution
摘要: Y-Ba-Cu-O thin films have been prepared on sapphire substrates by RF magnetron sputtering from sintered targets. The substrate temperature dependence of Ba and Cu concentrations against Y as-sputtered has clarified. Film composition deviated target composition. concentration decreased significantly with increasing Ts, while was independent the temperature. Using CuO-compensated Y1Ba6Cu10Ox target, assputtered high-Tc (Tc onset=87 K, Tc endpoint=40 K) successfully obtained as a Ts about 580°C.
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