Light scattering particle detector for wafer processing equipment

摘要: A particle detector includes a laser, beam shaping lens, and pair of mirrors which reflect the shaped laser back forth between selected number times in order to create sheet light or net mirrors. The path is terminated by stop contains photodiode monitor intensity thereby system alignment. Light scattered falling through gathered transmitted photodiode. peak provides measure such microprocessor, counts particles time interval. microprocessor also uses estimate size particle.