Sensor having a membrane as part of an electromechanical resonance circuit forming receiver and transmitter converter with interdigital structures spaced apart from one another

摘要: Sensor provided with a thin membrane, capable of storing electrical charges, whose surface is in contact the chemical, biological, and/or other physical parameters to be measured. The membrane part an electromechanical resonance circuit, operating propagating acoustic waves. Provision made opposite for converters, equipped interdigital structures, act as transmitter and receiver plate Each converters structures that narrow band, filters. converter arranged distance between them. signal from detected capacitively. A suitable electronic control evaluation circuit or feedback addition output converter. Finally, DC voltage applied on one hand other. has alternating superimposed it generation waves produced solely basis electrostatic attractive force excitation membrane. additionally decoupled capacitive manner such fashion vibration amplitude measured by capacitor formed side are spaced apart another spatial form gap. They have no mechanically solid connection another. dielectric gap therefore movement toward possible dielectric.