Evaporator body with titanium hydride coating, method for the production and usage thereof
作者： Hubert Josef Schweiger , Rodrigue Ngoumeni Yappi , Rudolf Karl Grau
DOI:
关键词: Evaporator 、 Hydride 、 A titanium 、 Titanium hydride 、 Physical vapor deposition 、 Materials science 、 Layer (electronics) 、 Coating 、 Chemical engineering 、 Metallurgy
摘要: An evaporator body for a PVD coating system comprises basic and an surface, to which titanium dihydride layer is applied. A hydride organic carrier agent as the single inorganic solid. The thickness of less than or equal 10 μm.
lens.org 参考文章(11)
Dietrich Lange, Martin Seifert, Christoph Lesniak, Ceramic evaporator crucibles, method for the production thereof, and use thereof ,(2006)
Martin Seifert, Process for producing a ceramic evaporation boat having an improved initial wetting performance ,(2001)
Ulrich Goetz, Michael Nürnberger, Initial Wetting Auxiliary Material for a Vaporiser Body ,(2006)
Samuel Baxter Alexander, Edward Boston Malcolm, Paul Alexander, Vacuum metallizing and apparatus therefor ,(1952)
Jeffrey Stephen Epstein, Coating System For A Ceramic Evaporator Boat ,(2008)
Marsden Jr Charles P, Brewer Frank H, Ceramic wafer, electronic tube ,(1953)
Edith M Mesick, Method of making a ceramic-to-metal bond ,(1952)
Hubert Josef Schweiger, Rudolf Karl Grau, Rodrigue Ngoumeni Yappi, Verdampferkörper für eine PVD-Beschichtungsanlage sowie Verfahren zum Bereitstellen eines derartigen Verdampferkörpers ,(2015)