Amplification measurements of alternative imaging gases in environmental SEM

摘要: In this paper, we present quantitative data on the amplification behaviour of alternative imaging gases in environmental SEM and describe experimental methods used to obtain them. We investigated gases' abilities over pressure range 0 - 12 Torr with respect primary beam energy, detector gap distance accelerating field, order isolate optimum conditions for each gas. The were, addition water vapour, nitrous oxide, carbon dioxide, nitrogen helium.