作者: Chan Zheng , Xueqing Xiao , Qiaohang Guo , Wei Li , Nengbin Hua
DOI: 10.1016/J.SURFCOAT.2021.127149
关键词: Contact angle 、 Thin film 、 Stress (mechanics) 、 Sputter deposition 、 Sputtering 、 Nanoscopic scale 、 Materials science 、 Composite material 、 Micrometre 、 Deformation (engineering)
摘要: Abstract This paper demonstrates how two-dimensional (2D) planar films transform into three-dimensional (3D) multi-stable structures with 3D surface wrinkling patterns by means of magnetron sputtering. The on metal deposited polydimethylsiloxane (PDMS) elastic substrates is studied. Surface the Al film results from compressive thermal stresses. effects thickness regularities are investigated. It found that labyrinth hierarchical for large sputtering flux span scale wavelengths (e.g., nanometer to micrometer). Moreover, hydrophobicity wrinkled has a good improvement contact angle. Furthermore, when bottom constraints removed, bilayer thin also spontaneously curl, evolving deformations and releasing inner stress, which present neutrally stable configurations no stiffness. Square eventually remain along diagonal as width decreases. Simultaneously, only pattern nanoscale wavelength due unrestraint. In addition, finite element method was performed simulate experimental deformation. Deformable multiple scales hold considerable promise practical applications in engineering.