Structural and optical properties of Fe-doped hydrogenated amorphous carbon films prepared from trans-2-butene by plasma enhanced metal organic chemical vapor deposition
作者： Hongliang Zhang , Weidong Wu , Chengshi Gong , Wei Wang , Zhibing He
DOI: 10.1007/S00339-009-5473-Y
关键词: Carbon film 、 Chemical vapor deposition 、 X-ray photoelectron spectroscopy 、 Photoluminescence 、 Analytical chemistry 、 Plasma-enhanced chemical vapor deposition 、 Amorphous carbon 、 Raman spectroscopy 、 Chemistry 、 Metalorganic vapour phase epitaxy
摘要: Fe-doped hydrogenated amorphous carbon (a-C:H:Fe) films were deposited from a gas mixture of trans-2-butene/ferrocene/H2 by plasma enhanced metal organic chemical vapor deposition. X-ray photoelectron spectroscopy, Fourier transform infrared spectra and Raman used to characterize the composition bonding structure a-C:H:Fe a-C:H films. Optical properties investigated UV–visible spectroscopy photoluminescence (PL) spectra. The contain more aromatic structures C=C bonds than undoped sp2 content clustering increase, aromatic-like rings’ become richer after Fe-doping. Tauc optical gap narrower 0.3 eV relative value PL peak shifts 2.35 1.95 films, intensity is greatly enhanced. A deep level emission around 2.04 observed.
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