On-chip Si/SiOx microtube refractometer

作者: A. Bernardi , S. Kiravittaya , A. Rastelli , R. Songmuang , D. J. Thurmer

DOI: 10.1063/1.2978239

关键词: SiliconRefractometerWhispering-gallery waveSpectral sensitivityOpticsSensitivity (electronics)Adaptive opticsSpectral shiftRefractive indexMaterials science

摘要: The authors fabricate rolled up microtubes consisting of Si/SiOx on Si substrate and analyze the possibility to use them as a refractometric sensor. An aqueous sugar solution is inserted into microtube, which leads change in refractive index and, result, detectable spectral shift whispering gallery modes. Experimental results can fit well with finite-difference time-domain simulations, are used determine sensitivity this tube refractometer. ratio channel cross-sectional area refractometer particularly striking allows analysis fluid volumes range femtoliters. A comparative discussion other existing schemes concludes work.

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