Static and dynamic responses of a microcantilever with a T-shaped tip mass to an electrostatic actuation

摘要: In this study, nonlinear static and dynamic responses of a microcantilever with T-shaped tip mass excited by electrostatic actuations are investigated. The force is generated applying an electric voltage between the horizontal part opposite electrode plate. cantilever microbeam modeled as Euler–Bernoulli beam. assumed to be rigid body effect considered. An equation motion its associated boundary conditions derived aid combining Hamilton principle Newton’s method. exact solution obtained for deflection mode shape vibration around position. differential position discretized using Galerkin system shapes used related comparison functions. equations solved perturbation theory in neighborhood primary subharmonic resonances. addition, effects inertia, moment inertia well rotation mass, which were ignored previous works, considered analysis. It shown that increasing length amount increases, natural frequency decreases shift resonance increases. concluded attaching plate configuration end results larger pull-in smaller compared directly attached it.