Large-range nanoscale self-mixing interferometer based on multiple reflections and even-power fast algorithm

摘要: Abstract We propose a novel integrated measuring technique (IMT) in self-mixing interference (SMI) for the nanoscale vibration, which is realized by combining multiple reflections with even-power fast algorithm Theoretical analysis show that fringe precision could be improved to λ /(2 n+3 ∗ G). The experiments amplitudes of 680 nm and 100 nm have been carried out verify feasibility IMT. minimum measurement error 1.34 nm, within theoretical range. Based on experimental results, alignment external mirror repeatability of experiment are also discussed. Given its high precision, compact structure, large range, proposed method has potential applications field nanometer measurement.