Sub-50-nm wide slot waveguides with good optical isolation on silicon on insulator

摘要: Although slot waveguide structures are widely used in all kinds of optical devices, very few articles focus on the issue isolation waveguides. This article, an effort to bridge gap available literature, focuses aspect waveguides and provides definitive rules for application different dense integration links. A with a 48-nm-wide was fabricated electron beam lithography inductively coupled plasma etching.