Opto-electronic micro-module and method for forming the same
作者： Kropp Joerg-Reinhardt
DOI:
关键词: Substrate (printing) 、 Monocrystalline silicon 、 Optoelectronics 、 Materials science 、 Opto electronic 、 Optics
摘要: An opto-electronic micro-module includes a monocrystalline substrate having first surface and second parallel to said surface, wherein through hole passes from surface; an optical portion in protruding hole.
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