Mobile elevator transporter for semi-automatic wafer transfer

摘要: A portable assembly allows semiconductor wafer boats to be transported safely from one processing device another at low cost using a small amount of the fabrication area without need for complicated automated systems. The includes two hollow bodies, which body may elevated electromechanically height cantilever oven opening. elevation conducted manually or automatically. upper contains rotating drum further four segmented cylinders, store and queue boats. lower safety shoe locking apparatus elevator mechanism activated only when is docked in appropriate location. also storage areas wafers progress. moved on set wheels rotated about its axis.