Vapour deposition method for fabricating lithium-containing thin film layered structures
作者： Christopher Edward Lee , Kyle James Hutchings , Laura Mary Perkins , Alexandros Anastasopoulos , Brian Elliott Hayden
DOI:
关键词: Chemical engineering 、 Lithium 、 Inorganic chemistry 、 Amorphous solid 、 Substrate (printing) 、 Thin film 、 Transition metal 、 Materials science 、 Atmospheric temperature range 、 Oxide 、 Layer (electronics)
摘要: A vapour deposition method for preparing a multi-layered thin film structure comprises providing source of each component element compound intended first layer and second layer, wherein the sources comprise at least lithium, oxygen, or one more glass-forming elements, transition metals; heating substrate to temperature; co-depositing elements from oxygen metals onto heated react on form crystalline lithium-containing metal oxide compound; temperature within range substantially 170° C. less an amorphous oxynitride compound.
lens.org 参考文章(69)
Arun K. Varshneya, Fundamentals of Inorganic Glasses ,(2006)
Chihiro Yada, Duncan Clifford Alan Smith, Christopher Edward Lee, Brian Elliott Hayden, Method for producing solid electrolyte membrane ,(2012)
Espen Dobakk, Fire door leaf for certified use ,(2012)
Deepika Singh, Rajiv Singh, Lithium-based rechargeable batteries ,(2003)
Christophe Degraer, Martin Lange, Substrate for lithium thin film battery ,(2008)
Dau Wu, Mohd. A. Aslami, Plasma deposition apparatus and method for making solar cells ,(2007)
Shoji Yokoishi, Chihiro Yada, Duncan Clifford Alan Smith, Hiroshi Suyama, Christopher Edward Lee, Thierry Le Gall, Brian Elliott Hayden, Solid electrolyte material, lithium battery, and method of producing solid electrolyte material ,(2010)
Hyoncheol Kim, Ann Marie Sastry, Marc Langlois, Myoungdo Chung, Thermal evaporation process for manufacture of solid state battery devices ,(2011)
Hirotaka Nishiyamoto Ohno, Hironori Matsunaga, Yasunari Okamoto, Method for evaluating a lithium niobate thin film and apparatus for preparing the same ,(1991)
Kai-Wei Nieh, Su-Jen Ting, Fan-Hsiu Chang, Chun-Ting Lin, Paul Tang, Victor Krasnov, Sputter deposition of lithium phosphorous oxynitride material ,(2001)