High-resolution detection of material property variations

摘要: The method to detect and determine the profile of material property or structure changes not only on surface but also at subsurface, a storage medium scanned sample. This comprises following steps: (a), nondestructive periodic modulated perturbation is applied sample be scanned. (b) perturbed then using microprobe, e.g., scanning tunneling microscopy (STM) atomic force (AFM), which responsive perturbations (c) output signals from in combination with input signals, are processed demodulated automatically control motion probe, profiles properties