Optical properties of amorphous SiNx(:H) films
作者： E A Davis , N Piggins , S C Bayliss
DOI: 10.1088/0022-3719/20/27/018
关键词: Dispersion (optics) 、 Hydrogen 、 Optics 、 Amorphous solid 、 Analytical chemistry 、 Materials science 、 Thin film 、 Silane 、 Silicon 、 Sputtering 、 Refractive index
摘要: The optical absorption edges and the dispersion behaviour of refractive index have been determined as a function composition x for thin films a-SiNx(:H), prepared (i) by glow-discharge decomposition gaseous mixture silane ammonia (ii) radio-frequency sputtering silicon in an argon-nitrogen(-hydrogen) atmosphere. data with without hydrogen used to evaluate certain characteristic energies these are then related other experimental results, particular those from photo-emission measurements.
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