Fabrication and characterization of a new MEMS fluxgate sensor with nanocrystalline magnetic core
作者： Jian Lei , Chong Lei , Yong Zhou
DOI: 10.1016/J.MEASUREMENT.2011.10.013
关键词: Fluxgate compass 、 Materials science 、 Noise (electronics) 、 Excitation 、 Harmonic 、 Band-pass filter 、 Electrical engineering 、 Microelectromechanical systems 、 Magnetic core 、 Electromagnetic coil 、 Optoelectronics
摘要: Abstract This paper presents a new MEMS fluxgate sensor with Fe-based nanocrystalline ribbon magnetic core and 3D micro-solenoid coils. The excitation coils were placed vertically to the sensing coil on chip plane. Second harmonic operation principle was adopted in this sensor. total size of 6.25 mm × 4.85 mm × 120 μm. A simple testing system established characterize fabricated devices. band pass filter used pick up second signals When rms current 120 mA operational frequency 200 kHz selected for devices, sensitivity developed 1005 V / T linear range −500 μT +500 μT. Due combination structure core, relatively low noise achieved. power density 544 pT/Hz 0.5 @1 Hz level 9.68 nT 25 mHz–10 Hz.
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sci-hub.se 参考文章(13)
Pavel Ripka, New directions in fluxgate sensors Journal of Magnetism and Magnetic Materials. ,vol. 215, pp. 735- 739 ,(2000) , 10.1016/S0304-8853(00)00273-0
L Perez, C Aroca, P Sánchez, E López, M.C Sánchez, Planar fluxgate sensor with an electrodeposited amorphous core Sensors and Actuators A-physical. ,vol. 109, pp. 208- 211 ,(2004) , 10.1016/J.SNA.2003.08.015
Trifon M Liakopoulos, Chong H Ahn, A micro-fluxgate magnetic sensor using micromachined planar solenoid coils Sensors and Actuators A: Physical. ,vol. 77, pp. 66- 72 ,(1999) , 10.1016/S0924-4247(99)00186-7
F. Primdahl, The fluxgate magnetometer Journal of Physics E: Scientific Instruments. ,vol. 12, pp. 241- 253 ,(1979) , 10.1088/0022-3735/12/4/001
R.S. Popovic, J.A. Flanagan, P.A. Besse, The future of magnetic sensors Sensors and Actuators A-physical. ,vol. 56, pp. 39- 55 ,(1996) , 10.1016/0924-4247(96)01285-X
Pavel Kejı́k, Laurent Chiesi, Balazs Janossy, Rade S. Popovic, A new compact 2D planar fluxgate sensor with amorphous metal core Sensors and Actuators A-physical. ,vol. 81, pp. 180- 183 ,(2000) , 10.1016/S0924-4247(99)00083-7
Hae-Seok Park, Jun-Sik Hwang, Won-Youl Choi, Dong-Sik Shim, Kyoung-Won Na, Sang-On Choi, Development of micro-fluxgate sensors with electroplated magnetic cores for electronic compass Sensors and Actuators A-physical. ,vol. 114, pp. 224- 229 ,(2004) , 10.1016/J.SNA.2003.11.037
Pavel Ripka, Advances in fluxgate sensors Sensors and Actuators A-physical. ,vol. 106, pp. 8- 14 ,(2003) , 10.1016/S0924-4247(03)00094-3
Maren Ramona Kirchhoff, Stephanus Büttgenbach, MEMS fluxgate magnetometer for parallel robot application Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems. ,vol. 16, pp. 787- 790 ,(2010) , 10.1007/S00542-009-0985-0
Mitra Djamal, Rahmondia Nanda Setiadi, Development of fluxgate magnetometer using double cores probe international symposium on industrial electronics. pp. 138- 142 ,(2009) , 10.1109/ISIE.2009.5222603