Method and apparatus for producing reactive species and method and apparatus for performing treatment by using reactive species

摘要: PROBLEM TO BE SOLVED: To provide a method and an apparatus for producing reactive species, wherein influence of charged particle such as ionic species can be avoided to performing treatment by using the species. SOLUTION: The is provided with: first reaction vessel 11 exciting rare gas 1 produce excited species; powder source 12 electrode 13 which are used generating plasma in 11; grounded mesh 14 restraining particles, produced when 11, from leaking outside flow path transferring second 16 where process 3 mixed; supply 15 introducing into zone 4. In 4, has life shorter than that 1, 1. COPYRIGHT: (C)2011,JPO&INPIT