Characteristics of the orientation distribution and carrier transport of polycrystalline Al-doped ZnO films prepared by direct current magnetron sputtering
作者： Junichi Nomoto , Hisao Makino , Tetsuya Yamamoto
DOI: 10.1016/J.TSF.2017.10.004
关键词: Doping 、 Sputter deposition 、 Ion plating 、 Hall effect 、 Analytical chemistry 、 Oxide 、 Volume fraction 、 Crystallite 、 Substrate (electronics) 、 Materials science
摘要: We investigated the influence of Al contents on the structural, electrical and optical properties of Al-doped ZnO (AZO) polycrystalline films with the columnar grain structures. In …
harvard.edu
sci-hub.se 参考文章(44)
M. H. Yoon, S. H. Lee, H. L. Park, H. K. Kim, M. S. Jang, Solid solubility limits of Ga and Al in ZnO Journal of Materials Science Letters. ,vol. 21, pp. 1703- 1704 ,(2002) , 10.1023/A:1020841213266
Nicolas Sommer, Mishael Stanley, Florian Köhler, Jan Mock, Jürgen Hüpkes, Role of the dopant aluminum for the growth of sputtered ZnO:Al investigated by means of a seed layer concept Journal of Applied Physics. ,vol. 118, pp. 035301- ,(2015) , 10.1063/1.4926735
Taeho Moon, Wonki Yoon, Kwang Sun Ji, Seh-Won Ahn, Sungeun Lee, Minho Joo, Hui Youn Shin, Kyuho Park, Heon-Min Lee, Microstructure and Light-Scattering Properties of ZnO:Al Films Prepared Using a Two-Step Process through the Control of Oxygen Pressure Applied Physics Express. ,vol. 3, pp. 095801- ,(2010) , 10.1143/APEX.3.095801
J. H. Shi, S. M. Huang, J. B. Chu, H. B. Zhu, Z. A. Wang, X. D. Li, D. W. Zhang, Z. Sun, W. J. Cheng, F. Q. Huang, X. J. Yin, EFFECT OF ZNO BUFFER LAYER ON AZO FILM PROPERTIES AND PHOTOVOLTAIC APPLICATIONS Journal of Materials Science: Materials in Electronics. ,vol. 21, pp. 1005- 1013 ,(2010) , 10.1007/S10854-009-0028-8
Naho Itagaki, Kazunari Kuwahara, Kenta Nakahara, Daisuke Yamashita, Giichiro Uchida, Kazunori Koga, Masaharu Shiratani, Highly Conducting and Very Thin ZnO:Al Films with ZnO Buffer Layer Fabricated by Solid Phase Crystallization from Amorphous Phase Applied Physics Express. ,vol. 4, pp. 011101- 011101 ,(2011) , 10.1143/APEX.4.011101
Naoki Yamamoto, Hisao Makino, Takahiro Yamada, Yoshinori Hirashima, Hiroaki Iwaoka, Takahiro Ito, Akira Ujihara, Hitoshi Hokari, Hidehiro Morita, Tetsuya Yamamoto, Heat Resistance of Ga-Doped ZnO Thin Films for Application as Transparent Electrodes in Liquid Crystal Displays Journal of The Electrochemical Society. ,vol. 157, ,(2010) , 10.1149/1.3267506
T. Terasako, H. Song, H. Makino, S. Shirakata, T. Yamamoto, Temperature dependence of electrical properties of Ga-doped ZnO films deposited by ion plating with DC arc discharge Thin Solid Films. ,vol. 528, pp. 19- 25 ,(2013) , 10.1016/J.TSF.2012.07.140
T. Watanabe, T. Hosokai, T. Koganezawa, N. Yoshimoto, In Situ Real-Time X-Ray Diffraction During Thin Film Growth of Pentacene Molecular Crystals and Liquid Crystals. ,vol. 566, pp. 18- 21 ,(2012) , 10.1080/15421406.2012.701111
M. Peres, S. Magalhães, M. R. Soares, M. J. Soares, L. Rino, E. Alves, K. Lorenz, M. R. Correia, A. C. Lourenço, T. Monteiro, Disorder induced violet/blue luminescence in rf-deposited ZnO films Physica Status Solidi (c). ,vol. 10, pp. 662- 666 ,(2013) , 10.1002/PSSC.201200873
Tetsuya Yamamoto, Takahiro Yamada, Aki Miyake, Hisao Makino, Naoki Yamamoto, Ga‐doped zinc oxide: An attractive potential substitute for ITO, large‐area coating, and control of electrical and optical properties on glass and polymer substrates Journal of The Society for Information Display. ,vol. 16, pp. 713- 719 ,(2008) , 10.1889/1.2953477