Electrothermal microgripper with large jaw displacement and integrated force sensors
作者： T. Chu Duc , G. K. Lau , J. F. Creemer , P. M. Sarro
DOI: 10.1109/MEMSYS.2008.4443707
关键词: Materials science 、 Electronic engineering 、 Acoustics 、 Cantilever 、 Grippers 、 Contact force 、 Displacement (vector) 、 Actuator 、 Piezoresistive effect 、 Sensitivity (electronics) 、 Voltage
摘要: This paper presents a novel sensing microgripper based on silicon-polymer electrothermal actuators and piezoresistive force cantilever beams which can monitor the displacement of jaws also contact between tips gripped object. A jaw motion up to 32 mum with an output voltage 49 mV 114 mW power consumption is measured at driving 4.5 V. The working temperature structure then 177degC. sensitivity 1.7 V/N corresponding 1.5 kV/m. minimum detectable 1 nm 770 nN are estimated, respectively.
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