Method of making hermetic feedthrough in ceramic substrate
作者： Wayne D. Pasco , Stephan P. Mitoff , Richard J. Charles
DOI:
关键词: Materials science 、 Metal 、 Ceramic substrate 、 Feedthrough 、 Ceramic 、 Refractory metals 、 Liquid metal 、 Substrate (printing) 、 Composite material 、 Phase (matter)
摘要: A process for producing an hermetic feedthrough in a ceramic substrate by providing sheet of liquid phase sinterable composition having hole, filling the hole with refractory metal metallization material, firing resulting structure to produce sintered and adherent wherein is comprised continuous phases glass, contacting electrically conductive intrusion heating temperature at which glassy fluid, solid, whereby preferentially wets metal, migrates into displacing glass and, upon subsequent solidification, partially or wholly occupies volume space originally containing phase.
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