Transparent and conductive electrodes combining AZO and ATO thin films for enhanced light scattering and electrical performance
作者： C. Guillén , J. Montero , J. Herrero
DOI: 10.1016/J.APSUSC.2012.10.042
关键词: Materials science 、 Thin film 、 Sputtering 、 Soda-lime glass 、 Sheet resistance 、 Chemical engineering 、 Substrate (electronics) 、 Transmittance 、 Electrical resistance and conductance 、 Optics 、 Texture (crystalline)
摘要: Abstract Al:ZnO (AZO) and Sb:SnO2 (ATO) thin films have been deposited by DC sputtering on soda lime glass (SLG) substrates. The preparation conditions were adjusted to obtain transparent with high conductivity for AZO texture ATO. Then, the combination of ATO has tested enhance optical scattering electrical performance. structure, morphology, optical, properties analyzed SLG/AZO, SLG/ATO SLG/ATO/AZO samples. surface characterized optically haze parameters transmittance reflectance (HT HR), which related root mean square roughness each sample. Some increase resistance is obtained rough underlayers as compared analogous grown directly smooth SLG substrate. Nevertheless, ATO/AZO bilayers allowed achieve better than greater isolated or films. In this way, average values HT = 30% HR = 72%, together sheet 20 Ω/sq. combining 150 nm-thick 800 nm-thick
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