Fabrication of nanometer structures using STM

作者: R. Wiesendanger

DOI: 10.1016/0169-4332(92)90055-3

关键词: Scale (ratio)Materials scienceScanning tunneling microscopeNanotechnologyMicroscopeFabricationNanometreSurface modification

摘要: Abstract The application of scanning tunneling microscopy (STM) to the fabrication nanometer scale structures is reviewed. Representative examples are given rather than trying present a complete overview surface modification procedures employed so far. issues writing speed as well ultimate decrease size written features addressed. Nanometer modifications performed with STM-related scanned probe microscopes also described.

参考文章(25)
U. Staufer, L. Scandella, R. Wiesendanger, Direct writing of nanometer scale structures on glassy metals by the scanning tunneling microscope European Physical Journal B. ,vol. 77, pp. 281- 286 ,(1989) , 10.1007/BF01313672
D. M. Eigler, E. K. Schweizer, Positioning single atoms with a scanning tunnelling microscope Nature. ,vol. 344, pp. 524- 526 ,(1990) , 10.1038/344524A0
E. E. Ehrichs, R. M. Silver, A. L. de Lozanne, Direct writing with the scanning tunneling microscope Journal of Vacuum Science and Technology. ,vol. 6, pp. 540- 543 ,(1988) , 10.1116/1.575378
M. Ringger, H. R. Hidber, R. Schlögl, P. Oelhafen, H.‐J. Güntherodt, Nanometer lithography with the scanning tunneling microscope Applied Physics Letters. ,vol. 46, pp. 832- 834 ,(1985) , 10.1063/1.95900
MA McCord, DP Kern, THP Chang, Direct deposition of 10-nm metallic features with the scanning tunneling microscope Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 6, pp. 1877- 1880 ,(1988) , 10.1116/1.584192
M. A. McCord, D. D. Awschalom, Direct deposition of magnetic dots using a scanning tunneling microscope Applied Physics Letters. ,vol. 57, pp. 2153- 2155 ,(1990) , 10.1063/1.103923
M. A. McCord, Lift-off metallization using poly(methyl methacrylate) exposed with a scanning tunneling microscope Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 6, pp. 293- 296 ,(1988) , 10.1116/1.583981
U. Staufer, R. Wiesendanger, L. Eng, L. Rosenthaler, H.‐R. Hidber, H.‐J. Güntherodt, N. Garcia, Surface modification in the nanometer range by the scanning tunneling microscope Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. ,vol. 6, pp. 537- 539 ,(1988) , 10.1116/1.575377
P. Bedrossian, D. M. Chen, K. Mortensen, J. A. Golovchenko, Demonstration of the tunnel-diode effect on an atomic scale Nature. ,vol. 342, pp. 258- 260 ,(1989) , 10.1038/342258A0