The manufacture of CMOS integrated circuits in a university microelectronics laboratory

作者: L. Fuller

DOI: 10.1109/UGIM.1999.782855

关键词: Semiconductor device fabricationMicroelectronicsElectronic engineeringSemiconductor factoryEngineeringElectrical engineeringIntegrated circuitFabricationCMOS

摘要: The manufacture of CMOS integrated circuits in a university laboratory course is difficult because the process complicated and time consuming. At RIT we have developed an approach that allows similar to manufacturing semiconductor factory. This student learn about addition fabrication technology for circuits.

参考文章(4)
L.F. Fuller, K.D. Hirschman, Teaching CMOS integrated circuit manufacturing laboratory using a student operated factory biennial university government industry microelectronics symposium. pp. 36- 39 ,(1997) , 10.1109/UGIM.1997.616676
L.F. Fuller, S.P. Blondell, J. Tierney, A cost analysis of operating a large integrated circuit laboratory at Rochester Institute of Technology biennial university government industry microelectronics symposium. pp. 76- 78 ,(1991) , 10.1109/UGIM.1991.148125
L.F. Fuller, K.H. Hesler, S.K. Kurinec, R.L. Lane, R.E. Pearson, B.W. Smith, I.R. Turkman, A new program at RIT: master of engineering in microelectronics manufacturing engineering Proceedings., Eighth University/Government/Industry Microelectronics Symposium. pp. 108- 111 ,(1989) , 10.1109/UGIM.1989.37315
L.F. Fuller, R.E. Pearson, I.R. Turkman, S. Kurinec, R.L. Lane, M.A. Jackson, B.W. Smith, Microelectronic engineering at RIT-10 years of industry partnership biennial university government industry microelectronics symposium. pp. 23- 28 ,(1993) , 10.1109/UGIM.1993.297043