Creating Virtual Prototypes of Complex MEMS Transducers Using Reduced-Order Modelling Methods and VHDL-AMS

摘要: In this chapter the creation of "virtual prototypes" complex micro-electro-mechanical transducers is presented. Creating these behavioural models can be partially automatised using a reduced-order modelling (ROM) method. It uses modal decomposition to represent movement flexible structures. Shape functions model energy conservation and full coupling between different physical domains. Both shapes shape for strain lumped capacitances structure derived in highly automated way from detailed 3D finite elements (FE) available earlier design stages. Separating generation same FE but operation directions circumvents current limitations used ROM These sub models are integrated into transducer. VHDL-AMS describe additional strong effects directions, which not considered by method itself. The application methodology on commercially-available yaw rate sensor as an example transducer demonstrates practical suitability approach.