作者: Wolfgang Prof Dr Dr Dultz , Hans W P Dr Koops
DOI:
关键词: Silicon photonics 、 Optoelectronics 、 Optical switch 、 Photonic integrated circuit 、 Silicon 、 Photonic crystal 、 Substrate (electronics) 、 Materials science 、 Optics 、 Waveguide 、 Deposition (phase transition)
摘要: The invention relates to an integrated optical circuit comprising a silicon substrate (1) and waveguides (2, 3) arranged thereon. At least one photonic crystal is provided as waveguide, which formed by mesh of needles (6). (6) can be produced corpuscular radiation deposition.