Integrated optical circuit

作者: Wolfgang Prof Dr Dr Dultz , Hans W P Dr Koops

DOI:

关键词: Silicon photonicsOptoelectronicsOptical switchPhotonic integrated circuitSiliconPhotonic crystalSubstrate (electronics)Materials scienceOpticsWaveguideDeposition (phase transition)

摘要: The invention relates to an integrated optical circuit comprising a silicon substrate (1) and waveguides (2, 3) arranged thereon. At least one photonic crystal is provided as waveguide, which formed by mesh of needles (6). (6) can be produced corpuscular radiation deposition.

参考文章(11)
Richard A. Steinberg, Thomas G. Giallorenzi, Polarization-independent optical switches/modulators ,(1978)
Ulrike Grüning, Volker Lehmann, Optische struktur und verfahren zu deren herstellung ,(1996)
Kim Byron Roberts, Photonic crystal waveguide arrays ,(1998)
Pierre R. Villeneuve, Shanhui Fan, Robert D. Meade, John D. Joannopoulos, Three-dimensional periodic dielectric structures having photonic bandgaps ,(1995)
Retzon Chen, Chen Tsai, GaAs-GaAlAs heterostructure single-mode channel-waveguide cutoff modulator and modulator array IEEE Journal of Quantum Electronics. ,vol. 23, pp. 2205- 2209 ,(1987) , 10.1109/JQE.1987.1073277
C. C. Cheng, Fabrication of photonic band-gap crystals Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 13, pp. 2696- 2700 ,(1995) , 10.1116/1.588051
Hans W. P. Koops, Photonic crystals built by three-dimensional additive lithography enable integrated optics of high density Photorefractive Fiber and Crystal Devices: Materials, Optical Properties, and Applications II. ,vol. 2849, pp. 248- 256 ,(1996) , 10.1117/12.255483
Toshiharu Kurosawa, Compact optical waveguide ,(1999)
Barbara Elizabeth Felindre Daymond-John, David George Cunningham, Richard Charles Booth, Alan Roy Beaumont, Wiliam Andrew Stallard, Optical signal modulation device ,(1987)