Pellet picking method and pellet picking apparatus

作者: Akira Nakatsu

DOI:

关键词: SuctionColletLower faceSuction forceEngineering drawingPelletMaterials scienceComposite materialHorizontal plane

摘要: A pellet picking apparatus for separating a adhered on an adhesive sheet from the and thus separated is provided, which prevents being damaged during process without lowering productivity. This comprises (a) stage having surface with lower face of contacted; upper sheet; suction hole that pulls down end to be contacted stage; movable in horizontal plane respect specific reference position; (b) collet holding by force; pellet; capable force at end. When placed such way located position, controlled hold same time, moved position thereby detach pellet. The pick detached sheet.

参考文章(6)
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Kishimoto Norikazu, SEMICONDUCTOR PELLET PICK UP DEVICE ,(1992)
Kikawa Masayuki, Hamazaki Toshiaki, Tanizaki Akinori, METHOD OF PEELING CHIP ,(1989)