Apparatus for making carbon nanotube structure with catalyst island

作者: Hongjie Dai , Calvin Quate , Hyongsok Soh , Jing Kong , None

DOI:

关键词: CatalysisSubstrate (electronics)Atomic force microscopyNanotechnologyElectronic circuitMaterials scienceCarbon nanotubeResonatorNode (physics)

摘要: Carbon nanotube growth is achieved in a high-yield process. According to an example embodiment of the present invention, furnace chamber adapted grow carbon device via catalyst islands. The includes island, such as Fe2O3, and extending therefrom. In one more specific implementation, island disposed on top surface substrate. useful variety implementations applications, atomic force microscope (AFM), resonators (e.g., where free end vibrate) electronic circuits electrically coupled between two nodes, circuit node). addition, growing nanotubes with particularly large number nanotubes.

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