Gettering mechanism in hydrocarbon-molecular-ion-implanted epitaxial silicon wafers revealed by three-dimensional atom imaging
作者： Ayumi Onaka-Masada , Ryosuke Okuyama , Toshiro Nakai , Satoshi Shigematsu , Hidehiko Okuda
关键词: Atom (order theory) 、 Physical chemistry 、 Polyatomic ion 、 Hydrocarbon 、 Getter 、 Wafer 、 Epitaxial silicon 、 Materials science
摘要:
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sci-hub.se 参考文章(37)
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