作者: F. Ghezzi , M. De Angeli
DOI: 10.1116/1.582082
关键词: Outgassing 、 Pressure measurement 、 Adsorption 、 Sorption 、 Chemistry 、 Atmospheric temperature range 、 Thermodynamics 、 Getter 、 Porosity 、 Hydrogen
摘要: We have assessed a conventionally configured apparatus to measure hydrogen equilibrium pressures of getter alloys over the temperature range 25 400 °C and concentration 0.02 1 H/A. An in situ approach has been proposed correlate measurements different gauges using one precisely calibrated as standard reference. The pressure interest was 10−7–105 Pa covered Bayart–Alpert gauge, spinning rotor capacitance gauges. involves measuring characteristic response these instruments prior determining relevant wall bed temperature. To evaluate accuracy measurements, we performed an error propagation analysis. use porous filter avoid fines contamination adsorption/desorption kinetics walls system were both addressed.