Neutron depth profiling applications at The University of Texas research reactor
作者： K. Ünlü , B. W. Wehring
DOI: 10.1007/BF02034455
关键词: Research reactor 、 Borophosphosilicate glass 、 Beam (structure) 、 Analytical chemistry 、 Nuclear engineering 、 Radiation damage 、 Microelectronics 、 Amorphous solid 、 TRIGA 、 Materials science 、 Neutron depth profiling
摘要: The neutron depth profiling (NDP) technique has become an increasingly important method to nondestructively measure the absolute concentration versus of various elements in substrates. A permanent NDP facility is operational at a tangential beam port 1-MW TRIGA Mark II research reactor University Texas Austin (UT). This was developed perform materials research, specifically measurements interest microelectronics industry. Applications UT-NDP include boron-10 profiles borophosphosilicate glass samples and helium-3 implanted metals, alloys amorphous materials. study underway determine radiation damage microstructural changes stainless steel by helium irradiation using Transmission Electron Microscopy. Another study, currently planned, surface wear measuring beryllium-7 sodium-22
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