Method and system for hybrid reticle inspection
作者： Carl Hess , Patrick LoPresti , John D. Miller , Shan Xue
DOI:
关键词: Automated optical inspection 、 Reticle 、 Process (computing) 、 Automated X-ray inspection 、 Engineering drawing 、 Computer vision 、 Artificial intelligence 、 Engineering
摘要: A semiconductor inspection apparatus performs a hybrid process including cell-to-cell inspection, die-to-die and die-to-golden or die-to-database inspection. The creates golden image of reticle complimentary to portions the that can be inspected by Alternatively, reduced database
lens.org 参考文章(44)
Greg Artzt, Steve Skiena, Mark Fasciano, Levon Lloyd, Media value engine ,(2011)
Valentine C. Matula, George Erhart, David Skiba, Method of automatic customer satisfaction monitoring through social media ,(2010)
Nemo Semret, Zutao Zhu, Jacob Baskin, Noam Wolf, Providing product recommendations through keyword extraction from negative reviews ,(2012)
Itay Birnboim, Amit Avner, Omer Dror, System and methods thereof for real-time detection of an hidden connection between phrases ,(2011)
Dan Meisburger, Alan D. Brodie, Zhong-Wei Chen, Jack Y. Jau, Inspecting optical masks with electron beam microscopy ,(1996)
David S. Alles, Shauh-Teh Juang, Yu Cao, Jun Ye, Yen-Wen Lu, James N. Wiley, Apparatus and methods for collecting global data during a reticle inspection ,(2000)
Yunbo Cao, Jian-Tao Sun, Ming Zhou, Shen Huang, Ling Bao, Zheng Chen, Jian Wang, Christoph R. Ponath, Chin-Yew Lin, Smart Sentiment Classifier for Product Reviews ,(2007)
Biow-Hiem Ong, Rick Lai, Chih-Chiang Tu, Jong-Yuh Chang, Chia-Shih Lin, Rendered database image-to-inspection image optimization for inspection ,(2010)
Hironori Ibusuki, Exposure pattern or mask and inspection method and manufacture method for the same ,(2007)