Microstructure and tribological properties of magnetron sputtered nc-TiC/a-C nanocomposite

作者: Sam Zhang , Xuan Lam Bui , Jiaren Jiang , Xiaomin Li

DOI: 10.1016/J.SURFCOAT.2004.10.041

关键词: Nanocrystalline materialMetallurgyMicrostructureAmorphous solidCrystalliteNanocompositeMaterials scienceNanoindentationTitaniumTribometerComposite material

摘要: Abstract In this study, nanocomposite nc-TiC/a-C coatings were deposited on polished stainless steel substrates and silicon wafers by co-sputtering of graphite titanium targets at a low temperature 150 °C. Atomic force microscopy (AFM), X-ray diffraction (XRD), photoelectron spectroscopy (XPS) used to investigate the morphology structure coatings. The hardness tribological properties assessed using Nanoindentation Tribometer. consisted two phases: nanocrystalline TiC embedded in amorphous matrix a-C. With Ti content less than 8 at.%, coating appeared amorphous. As increased 16 phase (nc-TiC) was detected. crystallite size range 5 nm as from 48 at.%. maximum 31 GPa obtained 36 at.%Ti. dry tribotests against ball, coefficient friction 0.24 but abruptly 0.39 reached 42 Extremely 0.046 with oil lubrication.

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