作者: Seán Kelly
DOI:
关键词: Capacitively coupled plasma 、 Waves in plasmas 、 Chemical physics 、 Chemistry 、 Inductively coupled plasma 、 Two-stream instability 、 Atmospheric-pressure plasma 、 Plasma cleaning 、 Plasma processing 、 Plasma parameters 、 Atomic physics
摘要: This work presents results of novel numerical studies investigating the interaction plasma, gas and heat dynamics for a variety popular source geometries. Plasma produced chemistry flux reaching treatment surface is investigated offering fundamental insight into induced plasma effects. Control opportunities reactive species delivery limitation in this context. The mixing helium air corona jet(’plasma needle’) shown to define shape composition region. Numerical analysis reveals an electropositive core surrounded by electro-negative edge reflecting mixture profile. This non-uniform production. Circular annular killing patterns recently found on bacteria treated here correlate with atomic oxygen distributions at surface. Interaction aqueous surface reveals hydrogen peroxide as dominant dissolving interface. Atomic O2 admixing capacitively coupled jet(’micro-Atmospheric Pressure Jet’) quickly convert ozone increasing device separation. Gas heating dominated elastic electron collisions positive ion heating. Power modulation demonstrated mechanism control surface. Power be extensively electrons large initial losses leading weak interference between successive phases. Frequency variation dielectric barrier discharge driven ~kHz frequency range vary power deposition changing interval current pulses. O2(a1D) O3 production is strongly admixture.