作者: A. K. Shuaibov , A. I. Minya , Z. T. Gomoki , I. V. Shevera , R. V. Gritsak
关键词: Partial pressure 、 Materials science 、 Argon flash 、 Plasma 、 Radiation 、 Atomic physics 、 Intensity (heat transfer) 、 Argon 、 Electron 、 Water vapor
摘要: This paper presents the results of a study spectral characteristics plasma radiation (175–200 nm) pulse-periodic capacitive-discharge lamp that operates with mixture water vapor and argon. It is shown capacitive discharge at low argon pressure broad-band source vacuum ultraviolet radiation. The intensity emission bands optimized as function partial pressures vapor. electron kinetic coefficients are calculated for in