Machine vision inspection system and method for performing high-speed focus height measurement operations
作者： Paul Gerard Gladnick
DOI:
关键词: Focus (computing) 、 Image stack 、 Engineering 、 Artificial intelligence 、 Field of view 、 Computer vision 、 Machine vision 、 Position (vector) 、 Phase (waves) 、 Region of interest
摘要: A machine vision inspection system comprising an illumination source and imaging a method for performing high-speed focus height measurement operations. The comprises: placing (1010) workpiece in field of view the system; determining (1020) region interest operations; operating (1030) to illuminate with strobed illumination; periodically modulating (1040) position along Z-height direction proximate workpiece; collecting (1050) image stack, wherein each stack corresponds instance matched phase modulated corresponding appropriate Z within stack; (1060) at least one portion interest.
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